Ammonia

High-purity Ammonia

Ultra pure ammonia is used as a process gas and plays an indispensable role in the manufacturing process of LED, PV, FPD and GaN semiconductor industries. 

 

In recent years, the rapid development of this industry has driven the rapid demand for ultra pure ammonia, especially the gallium nitride epitaxial technology, which not only needs ultra pure ammonia, but also needs a large flow supply scheme under stable gas supply pressure.

Supply Modes

Air Liquide supplying Ammonia in Cylinders, Ton Tanks and ISO Tanks.

For users who require a gas volume requirement of less than 100kg per month and spec requirement 99.9995% only, We provide cylinder gas packaging in 47L. 
For users who require a gas volume requirement of less than 8Ton per month and spec requirement 99.9995% or 99.99999%, We provide Ton Tanks gas packaging in 930L.
For users who require a gas volume requirement of more than 8Ton per month and spec requirement 99.99999%, We provide ISO Tank gas packaging. The ISO Tank is equipped with a large flow AVP heating system, and a single ISO tanker can output a supply flow of up to 3000slpm.

Safety Data Sheets (SDS)

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Supply Modes

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Applications

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